| 摘要 |
PROBLEM TO BE SOLVED: To completely automatize airtightness test process, obtain an optimum detection capability of the waste water trap and improve reliability of test results. SOLUTION: An airtightness test section 30 is constituted of a container box 35 provided with a containing inlet 36 for containing a trap body 4 from the upper part, a containing inlet closing means 37 forming an airtight space for closing the containing inlet 36 and containing the trap body 4, a flow inlet/outlet closing means for closing the flow inlet/outlet of waste water of the trap body 4 and forming a closed space in the trap body 4, an injection means 60 for producing trace gas of specific He concentration and injecting a specific amount of the trace gas into the closed space in the trap body 4, a quantifying means 70 for quantifying the content of He gas contained in the gas sampled in the closed space, and a judging means 80 for judging whether or not the trap body 4 ensures the airtightness based on the quantified He gas content. COPYRIGHT: (C)2006,JPO&NCIPI
|
