| 摘要 |
PROBLEM TO BE SOLVED: To enable fine adjustment of height dimension in relation to a reference surface by setting height of a step smaller than height of a sub base and a fixed base. SOLUTION: This height adjustment mechanism adjusts height dimension H1-H4 of a moving device in relation to the reference surface Hs in a structure that the moving device guiding an object of movement in a predetermined direction can be mounted on the sub bases 6a, 6b and that the sub bases are arranged on a fixed base 8. In the height adjustment mechanism, at least one step 12 in which the sub base and the fixed base mutually enter is provided on at least one of the sub base and the fixed base. Height T of the step is set smaller than height of the sub base and the fixed base. Also, height adjustment mechanism is provided with shims 10a, 10b of predetermined thickness arranged with entering in the step, and height of the step is set smaller than thickness of the shim. COPYRIGHT: (C)2006,JPO&NCIPI
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