| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid removing device forming patterns with good yield, generating little foreign matter caused by re-attaching on a pattern-forming substrate in a pattern development process of mainly plasma display members, and a production method of the plasma display members using a pattern forming method including the liquid removing device. SOLUTION: This liquid removing device comprises a liquid removing means removing liquid attached to the surface of the substrate, and a liquid-dropping preventive means above the substrate passing position. COPYRIGHT: (C)2006,JPO&NCIPI
|
