发明名称 |
Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge |
摘要 |
A method of fabricating a spatial light modulator. The method includes forming cavities in a first substrate and fabricating electrodes on a second substrate. The method also includes bonding the first substrate to the second substrate and forming a mirror plate from a portion of the first substrate. The mirror plate has an upper surface and a lower surface. The method further includes forming a hinge coupled to the mirror plate and forming a reflective surface coupled to the upper surface of the mirror plate.
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申请公布号 |
US2006209387(A1) |
申请公布日期 |
2006.09.21 |
申请号 |
US20060366991 |
申请日期 |
2006.03.01 |
申请人 |
MIRADIA INC. |
发明人 |
PAN SHAOHER X.;YANG XIAO (. |
分类号 |
G02B26/00;G02B26/08 |
主分类号 |
G02B26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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