发明名称 |
Sputtering devices and methods |
摘要 |
The invention provides devices and methods for depositing uniform coatings using cylindrical magnetron sputtering. The devices and methods of the invention are useful in depositing coatings on non-cylindrical workpiece surfaces. An assembly of electromagnets located within the bore of a hollow cylindrical emitter is used to form a magnetic field exterior to and near the exterior surface of the emitter. The magnet assembly configuration is selected to provide a magnetic field configuration compatible with the workpiece surface contour. The electromagnet assembly may be a plurality of magnet units, each unit having at least one electromagnet. The magnetic field strength from each magnet unit is separately and electrically adjustable. Each electromagnet in the assembly has a coil of electrically conducting material surrounding a specially shaped core of magnetic material.
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申请公布号 |
US2006207871(A1) |
申请公布日期 |
2006.09.21 |
申请号 |
US20050082208 |
申请日期 |
2005.03.16 |
申请人 |
YUMSHTYK GENNADY;IVANOV DMITRI |
发明人 |
YUMSHTYK GENNADY;IVANOV DMITRI |
分类号 |
C23C14/32;C23C14/00 |
主分类号 |
C23C14/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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