| 摘要 |
PROBLEM TO BE SOLVED: To provide an air slide device capable of precluding a seizure generated between a guide rail and a moving element. SOLUTION: The air slide device is to support the moving element 14 slidably with a gas jetted from a gas jetting surface 16 of a static pressure gas bearing pad 16 toward the oversurface 121 of the guide rail 12. Therein a recessed face 18 is formed at each end of the pad mounting surface 141 so that the gas jetting surface 161 of the static pressure gas bearing pad 16 protrudes toward the guide rail from the pad mounting surface 141 of the moving element 14. COPYRIGHT: (C)2006,JPO&NCIPI
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