| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro machine switch capable of simplifying a mounting equipment and capable of reducing power consumption in the mounting equipment, and its drive method. SOLUTION: The micro machine switch comprises a first contact part 33 on a substrate 30, a second contact part 35 arranged opposed on the first contact part 33, a flexible body 34 of which one end is connected to the second contact part 35, the other end is supported by the substrate 30, and has flexibility in the direction of contacting and separating from the first contact part 33, and a drive part 2 which vibrates the flexible body 34 in the direction of approaching the first contact part 33. COPYRIGHT: (C)2006,JPO&NCIPI
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