| 摘要 |
PROBLEM TO BE SOLVED: To enable processing automatic alignment of a charged particle beam column and automatic correction of astigmatism with high accuracy, and in a short time. SOLUTION: A beam is deflected toward two stop edges, a correction deflection field calculated, based on a necessary signal for obtaining quenching is given to a deflection part, and an automatic alignment is processed. Furthermore, defocusing is provided by a modulation (wobbling) of acceleration voltage, a signal calculated, based on an image shift generated above, is given to the deflection part, and an automatic alignment is processed. In addition, sharpness is evaluated for a sequence of frames measured, while the acceleration voltage and astigmatism correction coil exciting current are varied, the astigmatism correction coil exciting current is set to the optimal value, and astigmatism is corrected automatically. COPYRIGHT: (C)2006,JPO&NCIPI
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