| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an exposure device and method which prevent a liquid crystal mask from degrading due to heat and light, when being exposed, and also to provide an electrio-optical device. <P>SOLUTION: This exposure method includes: transferring a predetermined pattern to a photosensitive material 42 on a substrate 1 by using a liquid crystal mask 8; separating the light emitted from a light source 5 in a predetermined wavelength range into a 1st light 44, having a wavelength band in the visible light range and a 2nd light 46, having a wavelength band outside the visible light range by using a spectroscopic means 7; and radiating the 1st light 44 to the liquid crystal mask 8. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
