| 摘要 |
PROBLEM TO BE SOLVED: To provide a device and method for determining a crystal structure of ceramics capable of determining a crystal state of thin film ceramics of which crystal state is more difficult to be obtained than a bulk state especially with an influence such as stress, more easily, in a shorter time, and with a higher accuracy than by a conventional method. SOLUTION: This device 1 determines a crystal structure of the ceramics with a perovskite structure formed so that the component is adjusted to be near a phase boundary between tetragonal and rhombohedral systems. The device comprises a Raman device 2 that radiates a laser beam for excitation for exciting Raman scattered light to a sample S made of the ceramics and detects the Raman scattered light from a sample S with a detector, and a determining means 3 for investigating the existence of the peak within a frequency range of 330 cm<SP>-1</SP>±20 cm<SP>-1</SP>based on the detection result by the Raman device 2. COPYRIGHT: (C)2006,JPO&NCIPI
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