| 摘要 |
PROBLEM TO BE SOLVED: To provide a technology capable of correctly positioning the position of each mask part when fixing a metal mask 1 having a plurality of mask parts 2 to a frame while the metal mask is subjected to the tension. SOLUTION: Each side of the metal mask 1 is held and pulled by a plurality of tension units 13 and the mask 1 is subjected to the tension. A glass scale 25 overlaps the mask 1, and the tension is adjusted so that cruciform marks 6a-6d formed on the mask 1 are matched with the reference mark formed on the glass scale 25, thereby each mask part 2 is correctly positioned. In addition, four corners of the glass scale 25 are supported by a supporting frame 40 via a connection member 41 to eliminate the deflection caused by the self weight of the four corners of the glass scale 25 so as to obtain uniform gaps between the glass scale 25 and the mask 1. COPYRIGHT: (C)2006,JPO&NCIPI
|
