| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for nitriding titanium or a titanium alloy capable of quickly forming a nitrided layer at a low temperature. SOLUTION: Titanium or a titanium alloy is treated in a nitrogen atom plasma bath with a high density and a high dissociation degree excited by electron beams. A treatment device composed of: an electron beam excitation ion source for generating nitrogen atom plasma with a high density and a high dissociation degree; a treatment tank for storing plasma and performing nitriding treatment; a vacuum system device; a heating apparatus; and a gaseous starting material system device is used. The object to be treated composed of titanium or a titanium alloy is placed in the treatment tank, the inside of the treatment tank is made into a vacuum state, a gaseous starting material is fed thereto, electrons are drawn out from discharge plasma by an accelerating electrode, the electron beams thereof are introduced into the treatment tank, and the gaseous starting material is made into plasma and is acted on the object to be treated, thus a nitrogen compound layer or a nitrogen-diffused layer is produced on its surface. COPYRIGHT: (C)2006,JPO&NCIPI
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