WASHING METHOD AND WASHING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a washing apparatus made compact and easy to control and a washing method capable of efficiently removing impurities adhering to a part of an object member to be washed such as surface easy to be washed. SOLUTION: The washing method involves a first washing step of supplying a liquid washing solvent to a washing tank (1) housing an object member to be washed and bringing the liquid washing solvent into contact with the object member to be washed (W) and a second washing step of making the liquid washing solvent supplied to the washing tank be a supercritical fluid by heating in closed state and bringing the supercritical fluid into contact with the object member to be washed. The washing apparatus for the method is provided with a liquid cylinder (2) installed at a position higher than the washing tank and heating means (4) installed in the outer circumferential part or the inside of the washing tank (1) having means for bringing the object member to be washed into contact with the washing solvent for heating the liquid washing solvent and making the solvent be the supercritical fluid. COPYRIGHT: (C)2006,JPO&NCIPI