发明名称 Method of manufacturing patterned ferroelectric media
摘要 A method of manufacturing patterned ferroelectric media, which includes forming an electrode on a substrate; forming features having a predetermined pattern on the electrode, the features including a precursor for forming a ferroelectric material; and reacting a source material with the precursor features to transform the precursor features into ferroelectric features. Also disclosed is a method which includes forming on a substrate an electrode having wells and precursor features formed in the wells of the electrode, the precursor features including a precursor for forming a ferroelectric material; and reacting a source material with the precursor features to transform the precursor features into ferroelectric features. The above first embodiment relates to non-embedded type media, and the above second embodiment relates to embedded type media.
申请公布号 US2006211154(A1) 申请公布日期 2006.09.21
申请号 US20060384326 申请日期 2006.03.21
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 BUEHLMANN SIMON;HONG SEUNG-BUM
分类号 H01L21/00 主分类号 H01L21/00
代理机构 代理人
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