| 摘要 |
PROBLEM TO BE SOLVED: To realize an apparatus for manufacturing semiconductors that reduces an influence of fine particles produced in a current introduction terminal having a rotationally sliding part onto a sensor and the like, which are precision parts, and has a high availability factor and high productivity. SOLUTION: The semiconductor-manufacturing apparatus is provided with the current introduction terminal 3 having the rotationally sliding part, wherein the current introduction terminal 3 comprises: a fixed current terminal 1 which is electrically connected to a power source 9; a rotating current terminal 2 which is electrically connected to a cathode electrode 5; a rotating shaft 27 for rotating the rotating current terminal 2 and a holding board 15; and a housing member 4 for accommodating a motor for driving the rotating shaft 27. The rotating current terminal 2 rotates in a state of contacting with the fixed current terminal 1. A discal splash prevention member 31 is placed between the contact face of the fixed current terminal 1 with the rotating current terminal 2 and an encoder 25, as a mechanism for preventing chips 6 produced in the contact face from spreading. COPYRIGHT: (C)2006,JPO&NCIPI
|
