| 摘要 |
PROBLEM TO BE SOLVED: To provide a multifrequency inspection technique for an eddy current under a surface capable of improving undersurface detection in an inside of an inspection objective component. SOLUTION: In this component inspection method, a plurality of multifrequency excitation signals is applied to a probe to generate a plurality of multifrequency response signals in the inspection objective component. Multifrequency phase analysis is executed in the multifrequency response signals to inspect an under side of the surface of the component. This inspection system includes the eddy current (EC) probe constituted to induce an eddy current in an inside of the component. The system is an eddy current measuring instrument coupled to the EC probe, and for applying the multifrequency response signals to the EC probe to generate the plurality of multifrequency response signals. The system includes further a processor constituted to analyze the multifrequency response signals from the eddy current measuring instrument by executing the multifrequency phase analysis, so as to inspect the under side of the surface of the component. COPYRIGHT: (C)2006,JPO&NCIPI
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