| 摘要 |
PROBLEM TO BE SOLVED: To provide a vibrator that can be driven at a low drive voltage and vibrated at a comparatively lower oscillation frequency while being miniaturized and to provide an electronic apparatus provided with the vibrator. SOLUTION: The vibrator comprises: support parts 27; moving electrodes (first moving electrodes 21, 22, and a second moving electrode 23) turnable with respect to the support parts 27; first and second elastic coupling parts 28, 29 for directly or indirectly coupling the support parts 27 to the moving electrodes so that the moving electrodes can be turned with respect to the support parts 27; and fixed electrodes (first fixed electrodes 24, 25, and a second fixed electrode 26) opposite to the turning center shafts of the moving electrodes at an interval from the moving electrodes, the first moving electrodes 21, 22 are turned around their turning center shafts to be vibrated and a static capacitance caused between the second moving electrode 23 and the second fixed electrode 26 is detected. COPYRIGHT: (C)2006,JPO&NCIPI
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