| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid ejection head which is highly integrated and improved in reliability, and to provide a liquid ejection device. SOLUTION: A piezoelectric element 300 consisting of a lower electrode 60, a piezoelectric body layer 70, and an upper electrode 80, is formed via a diaphragm on a channel forming substrate 10 in which pressure generating chambers communicating with nozzle apertures 21 and defined by partition walls is arranged. Then a groove 301 is formed in the piezoelectric element 300 at a laterally central location of the pressure generating chamber 12 of an area facing each pressure generating chamber 12, in a longitudinal direction, and the lower electrode 60 is arranged in an area facing each pressure generating chamber 12 to serve as an individual electrode of each piezoelectric element 300. Further the piezoelectric body layer 70 and the upper electrode film 80 are continuously formed over an area in which the plurality of pressure generating chambers 12 are formed, whereby the upper electrode 80 serves as a common electrode for the plurality of piezoelectric elements 300 in common. COPYRIGHT: (C)2006,JPO&NCIPI
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