发明名称 Semiconductor integrated circuit arrangement device and method
摘要 An arrangement device including: a photography section, which photographs a first mark and a second mark in a state in which a semiconductor integrated circuit to which the first mark is applied and a member to which the second mark is applied, which member is to be used in combination with the semiconductor integrated circuit, overlap; and a movement section, which relatively moves at least one of the semiconductor integrated circuit and the member with respect to the other thereof on the basis of positions of the first mark and the second mark which have been photographed by the photography section.
申请公布号 US2006211168(A1) 申请公布日期 2006.09.21
申请号 US20050204020 申请日期 2005.08.16
申请人 FUJI XEROX CO., LTD. 发明人 ORMOND BRIAN;UMEZAWA TOMOKI
分类号 H01L21/00;H01L33/48 主分类号 H01L21/00
代理机构 代理人
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