Turbomolecular vacuum pump

摘要

A turbomolecular pump comprises a pumping mechanism and an electric motor ( 10 ) for driving the pumping mechanism. The electric motor comprises a rotor ( 14 ), a stator and stator windings ( 20 ). The stator comprises a yoke [ 18 ( 1 ), 18 ( 2 )] and a plurality of teeth ( 16 ) projecting from the yoke and carrying the stator windings. The yoke and the teeth are made of a non-sintered magnetic powder material in which the powder particles are bonded by an electrically insulating binder.