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发明名称
THIN FILM DEPOSITING APPARATUS OF SEMICONDUCTOR DEVICE MANUFACTURING EQUIPMENT
摘要
申请公布号
KR20060100518(A)
申请公布日期
2006.09.21
申请号
KR20050022076
申请日期
2005.03.17
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KIM, HAK YOUNG
分类号
C23C14/24
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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