| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a coated substrate end developing jig by which such a problem as a residual film does not arise when an unnecessary thick coated film is melted and removed from ends and four corners of the coated substrate wherein a resist or the like is applied to the substrate to form a coated film. <P>SOLUTION: A coated substrate jig 100 is a coated substrate end developing jig. The jig is constructed in such a manner that a U-shaped developing jig is constructed of an upper-jaw jig 10 and a lower-jaw jig 20, at the tip of the developing jig between the upper-jaw jig 10 and the lower-jaw jig 20, there are formed a treatment liquid storage 52 for developing ends of the coated substrate, a treatment liquid supply 51 that supplies the liquid storage with the treatment liquid, and a treatment liquid discharge part 53 that discharges the treatment liquid, the treatment liquid supply 51 and the treatment liquid discharge part 53 are connected with each other through a discharge passage 54 with a dam 21 between, and the upper-jaw jig 10 is provided on its lower face positioned above the discharge passage 54 with a taper 11. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
