| 摘要 |
To provide a scanning probe microscope which measures an electric property of a sample with a high degree of accuracy without being affected by light leak. The scanning probe microscope is provided with a self detection type probe 6 including a cantilever 3 whose probe 2 is disposed at its front end, a supporting part 4 that supports the cantilever 3 , and a piezoresistance element 5 whose resistance value is changed depending on the change amount of the cantilever 3 ; detecting means that detects the value of the current passing through the piezoresistance element 5 so as to detect the change amount of the cantilever 3 ; moving means that relatively moves a sample table that mounts the sample thereon and the probe 2 along X and Y directions and a Z direction; control means that controls the moving means so that a distance between the probe 2 and the surface of the sample is fixed and measures the surface shape of a sample S; applying means that applies a predetermined voltage between the probe 2 and the surface of the sample; and measuring means that measures the electric property information caused by the applied voltage; wherein the probe 2 is elongated to the base end side of the cantilever 3 and is electrically connected to a conducting film 28 that can be electrically connected to the measuring means.
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