HIGH ACCURACY VAPOR GENERATION AND DELIVERY FOR THIN FILM DEPOSITION
摘要
<p>The present invention involves injecting a liquid and gas into a vapor holding chamber held at a sufficiently high temperature to insure all the liquid injected is vaporized and held in the chamber 30 as a vapor. The gas/vapor mixture is then delivered to the deposition chamber 70 in which the deposition substrate is held.</p>
