| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe head and an inspection method capable of bringing surely an electrode of a specimen into continuity with a conductor, without damaging the specimen and the conductor. SOLUTION: This probe head is provided with a stopper having an abutting part contacting with the specimen to be moved pressed by the specimen, and the conductor with a tip part positioned in a specimen side of the abutting part, deformed by contact with the electrode of the specimen before the stopper abuts to the specimen, and moved as the whole together with the stopper. COPYRIGHT: (C)2006,JPO&NCIPI
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