| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a device for conveying a substrate capable of reliably preventing the substrate from being charged when conveying the substrate. SOLUTION: The method for conveying the substrate for conveying a substrate 2 while removing charges on the substrate 2 comprises a step of depositing a conductive film 21 on a part of a surface of the substrate 2, and a step of conveying the substrate 2 while supporting a deposition area of the conductive film 21 of the substrate 2 by a conductive roller 5 as a grounded substrate supporting part. COPYRIGHT: (C)2006,JPO&NCIPI
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