PHOTOSENSITIVE CERAMIC GREEN SHEET, ITS MANUFACTURING METHOD AND PROCESSING METHOD, AND CERAMIC SUBSTRATE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a photosensitive ceramic green sheet and its processing method for extremely easily and precisely forming a fine pattern.

SOLUTION: The photosensitive ceramic green sheet includes a photosensitive ceramic layer on a support. A mask pattern is formed on the support. In the method for processing the photosensitive ceramic green sheet, the photosensitive ceramic green sheet is exposed from the side of the support on which at least the mask pattern is formed to form a latent image, and is then developed.

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