| 摘要 |
<P>PROBLEM TO BE SOLVED: To detect a precise and stable change in angular velocity by the optimum configuration and packaging structure of a vibration element. <P>SOLUTION: In the vibration type gyro sensor, the vibration element 20 that projects integrally in a cantilever shape from the outer-periphery section of a base section 22 and comprises a vibration terminal 23 wherein a first electrode layer 27, a second electrode layer 29 and a detection electrode 30 are laminated and formed in a longitudinal direction via a piezoelectric thin-film layer 28 is mounted on a support substrate 2 via a gold bump 25 provided at the base section 22. The vibration element 20 is formed by increasing the width of the base section 22 at least two times larger than the width dimension (t6) of a vibrator section 23 and positioning the center gravity at a region within the range of [±2×t6] to the center axis in the longitudinal direction of the vibrator section 23. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
