| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid droplet ejection apparatus capable of performing efficient drying and calcination by accurately irradiating a liquid droplet containing a delivered function material with a laser light. SOLUTION: A liquid droplet ejection head 30 is constituted of a first substrate 31, a second substrate 32 and a third substrate 33 and a nozzle N is formed between the first substrate and the second substrate. A cavity 32c is connected to the nozzle N. A functional liquid Fa in which manganese fine particles are disperse by a dispersing medium is stored in the cavity 32c. There is a vibration plate 32b in the cavity 32c and an electrostatic actuator is constituted by an electrode 33a for vibrating the vibration plate 32b and it. A semiconductor laser L is connected to the first substrate 31. The first substrate 31 is utilized as a light path (guide) of the laser light from the semiconductor laser L. Further, a liquid droplet Fb deposited on a glass substrate 2 is irradiated with the laser light passing through the light path. COPYRIGHT: (C)2006,JPO&NCIPI
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