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发明名称
METHOD FOR FORMING METAL ELECTRODES SEPARATED BY A NANOMETER-SCALE GAP
摘要
申请公布号
KR100627023(B1)
申请公布日期
2006.09.21
申请号
KR20040044125
申请日期
2004.06.15
申请人
发明人
分类号
H01L29/40
主分类号
H01L29/40
代理机构
代理人
主权项
地址
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