发明名称 THIN FILM TRANSISTOR COMPRISING CAPPING LAYER AND METHOD OF MANUFACTURING THE SAME
摘要 <p>A thin film transistor and a method of manufacturing the thin film transistor. The thin film transistor may include a substrate, a buffer layer, a polysilicon layer, a gate insulating layer and/or a gate electrode, and a capping layer. The buffer layer may be formed on the substrate. The polysilicon layer may be formed on the buffer layer, and may include a first doped region, a second doped region, and a channel region. The gate insulating layer and a gate electrode may be sequentially stacked on the channel region of the polysilicon layer. The capping layer may be stacked on the gate electrode.</p>
申请公布号 KR20060099870(A) 申请公布日期 2006.09.20
申请号 KR20050021377 申请日期 2005.03.15
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 HUAXIANG YIN;TAKASHI NOGUCHI;WENXU XIANYU;KIM, DO YOUNG;JUNG, JI SIM;KWON, JANG YEON
分类号 H01L29/786 主分类号 H01L29/786
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