| 摘要 |
The invention provides a novel azidocinnamaldehyde compound which, when used as an intermediate for providing a photosensitive moiety of a photoresist, introduces a photosensitive moiety having high sensitivity and attaining high contrast between the exposed portion and the unexposed portion, and which per se can serve as a photosensitive moiety. The azidocinnamaldehyde compound is represented by formula (I) : <CHEM> wherein R represents a lower alkyl group and Y represents hydrogen or a sulfonate salt group. |
