METHOD AND APPARATUS FOR SUBSTRATE TRANSFER AND PROCESSING,申请号KR20007013029-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR SUBSTRATE TRANSFER AND PROCESSING
摘要
申请公布号	KR100625913(B1)	申请公布日期	2006.09.20
申请号	KR20007013029	申请日期	2000.11.20
申请人		发明人
分类号	H01L21/68	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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