发明名称 MEMBRANE PROBING SYSTEM
摘要 A substrate, preferably constructed of a ductile material and a tool having the desired shape of the resulting device for contacting contact pads on a test device is brought into contact with the substrate. The tool is preferably constructed of a material that is harder than the substrate so that a depression can be readily made therein. A dielectric (insulative) layer, that is preferably patterned, is supported by the substrate. A conductive material is located within the depressions and then preferably lapped to remove excess from the top surface of the dielectric layer and to provide a flat overall surface. A trace is patterned on the dielectric layer and the conductive material. A polyimide layer is then preferably patterned over the entire surface. The substrate is then removed by any suitable process.
申请公布号 KR100626166(B1) 申请公布日期 2006.09.20
申请号 KR20000030592 申请日期 2000.06.03
申请人 发明人
分类号 G01R31/26;G01R1/067;G01R1/073;G01R3/00;H01L21/66 主分类号 G01R31/26
代理机构 代理人
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