| 摘要 |
<p>An electrostatic micro switch (1,42, 52, 62a, 62b) comprises a fixed electrode (12) which is provided in a fixed substrate (10); a movable substrate (20) which includes a movable electrode (23), the movable electrode (23) being arranged while facing the fixed electrode (12), the movable substrate (20) being elastically supported by the fixed substrate (10); a fixed-side signal conducting unit (13,14) which is provided in the fixed substrate (10); and a movable-side signal conducting unit (28) which provided in the movable substrate (20), the movable-side signal conducting unit (28) displacing the movable substrate (20) by electrostatic attraction between the movable electrode and the fixed electrode (12) to perform switching between the movable-side signal conducting unit (28) and the fixed-side signal conducting unit (13, 14), wherein the movable substrate (20) is made of a semiconductor including a plurality of regions having different values of resistivity; at least a portion where the movable-side signal conducting unit (28) is provided and a portion which faces the fixed-side signal conducting unit (13, 14) have high resistivity in the movable substrate (20); and at least a part of the movable electrode has low resistivity.</p> |
