| 摘要 |
FIELD: production of monocrystals of semiconductor compounds and their solid solutions of controllable composition used in semiconductor industry. ^ SUBSTANCE: proposed device includes working chamber, coupling with clamps, furnace with circular heater, crystallization vessel with heat-removal rod, heated vessels for evaporation of volatile components with vapor lines for delivery of vapor to solution-melt, replenishing reservoir placed in crystallization vessel and connected with working chamber by means of capillary and separated into N reservoirs having branch pipes in their bottoms with double-acting valves and with wall over perimeter which forms working chamber connected with volatile component evaporation reservoirs by means of vapor lines; it is provided with two-layer spiral heater with current leads passing through tubing and circular permanent magnet. Device is also provided with float chamber fitted with hollow float with hollow rod which is fastened with crystallization vessel and placed in liquid of float chamber; float chamber is provided with ferro-magnetic cylinder molded with plastic and placed in liquid; it is set in motion by means of circular permanent magnet; branch pipes with double-acting valves have holes in their sides. ^ EFFECT: enhanced safety and ease in use; possibility of moving the crystallization vessel with no impairment of tightness. ^ 2 cl, 3 dwg |
