EXHAUST SYSTEM FOR SEMICONDUCTOR DEPOSITION EQUIPMENT,申请号KR20050021216-传众专利搜索

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发明名称	EXHAUST SYSTEM FOR SEMICONDUCTOR DEPOSITION EQUIPMENT
摘要
申请公布号	KR20060099777(A)	申请公布日期	2006.09.20
申请号	KR20050021216	申请日期	2005.03.15
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	JANG, JIN SOO
分类号	H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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