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发明名称
BEAM GATE CHAMBER FOR ION IMPLANTER
摘要
申请公布号
KR20060099776(A)
申请公布日期
2006.09.20
申请号
KR20050021215
申请日期
2005.03.15
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
LEE, HA SUNG
分类号
H01L21/265;H01L21/02
主分类号
H01L21/265
代理机构
代理人
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