METHOD OF INSPECTING WAFER USING E-BEAM,申请号KR20050021682-传众专利搜索

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发明名称	METHOD OF INSPECTING WAFER USING E-BEAM
摘要
申请公布号	KR20060100051(A)	申请公布日期	2006.09.20
申请号	KR20050021682	申请日期	2005.03.16
申请人	HYNIX SEMICONDUCTOR INC.	发明人	LEE, JONG PIL
分类号	H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
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