发明名称 Method of descaling mask
摘要 Provided is a method of descaling a mask that quickly and effectively removes a material attached to the mask. The method includes: directing a laser beam onto a material attached to the mask; and removing the material attached to the mask.
申请公布号 KR100626037(B1) 申请公布日期 2006.09.20
申请号 KR20040094419 申请日期 2004.11.18
申请人 发明人
分类号 H05B33/10;B08B3/04;B08B3/08;B08B3/10;B08B3/12;B08B7/04;C23C14/04;G03F1/00;H01L51/50 主分类号 H05B33/10
代理机构 代理人
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