| 摘要 |
Manufacturing equipment performs different processes, including a first process that produces a reaction products and a second process that removes the reaction products, in a same chamber. The amount of reaction products in the chamber is monitored, and a priority order between the first and the second processes is set based on the monitored amount of the reaction products. The order of the first and the second processes is determined based on the set priority order. The amount of reaction products can be kept within an acceptable range without performing a long-period lot-to-lot cleaning, and a high manufacturing efficiency is realized.
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