发明名称 PACKING MATERIAL FOR WAFER
摘要 <p>A packing material for wafer packed up by stacking up a plurality of wafers, includes: a protective sheet protecting an optical surface being glued to an entire upper surface of the wafer; a dicing tape being concurrently glued to an entire lower surface of the wafer; and a first buffer being inserted in between each of the plurality of wafers and stacked up, whereafter both ends being protected with a second buffer.</p>
申请公布号 KR20060099438(A) 申请公布日期 2006.09.19
申请号 KR20060022295 申请日期 2006.03.09
申请人 EPSON TOYOCOM KABUSHIKI KAISHA 发明人 MATSUSHITA HIROSHISA
分类号 H01L21/677 主分类号 H01L21/677
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