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发明名称
METHOD FOR DEPOSITION OF ULTRA THIN FILM IN SEMICONDUCTOR DEVICE MANUFACTURING PROCESS
摘要
申请公布号
KR20060099059(A)
申请公布日期
2006.09.19
申请号
KR20050020055
申请日期
2005.03.10
申请人
JUSUNG ENGINEERING CO., LTD.
发明人
CHO, JIN SU
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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