发明名称 Methods for producing a dielectric, dielectric having self-generating pores, monomer for porous dielectrics, process for preparing poly-o-hydroxyamides, process for preparing polybenzoxazoles, and processes for producing an electronic component
摘要 Poly-o-hydroxyamides include binaphthyl substituents as repeating units. The poly-o-hydroxyamides can be cyclized to give the polybenzoxazole by heating. Pore formation occurs, so that a dielectric having a very low dielectric constant k of less than 2.5 is obtained.
申请公布号 US7108807(B2) 申请公布日期 2006.09.19
申请号 US20030424376 申请日期 2003.04.28
申请人 INFINEON TECHNOLOGIES AG 发明人 SEZI RECAI;WALTER ANDREAS;LOWACK KLAUS;MALTENBERGER ANNA;BANFIC ROBERT
分类号 H01B3/30;C08G69/26;C08G69/44;C08G73/22;C09D5/25;H01L21/312;H01L21/316;H01L23/532;H05K1/03 主分类号 H01B3/30
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