Apparatus to control pressure for semiconductor equipment,申请号KR20040092347-传众专利搜索

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发明名称	Apparatus to control pressure for semiconductor equipment
摘要
申请公布号	KR100621768(B1)	申请公布日期	2006.09.19
申请号	KR20040092347	申请日期	2004.11.12
申请人		发明人
分类号	H01L21/02	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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