发明名称 |
Method for making an integrated circuit comprising a waveguide having an energy band engineered superlattice |
摘要 |
A method for making an integrated circuit may include forming at least one active optical device and a waveguide coupled thereto. The waveguide may include a superlattice including a plurality of stacked groups of layers. Each group of layers of the superlattice may include a plurality of stacked base semiconductor monolayers defining a base semiconductor portion and an energy band-modifying layer thereon. The energy-band modifying layer may include at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions.
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申请公布号 |
US7109052(B2) |
申请公布日期 |
2006.09.19 |
申请号 |
US20040936920 |
申请日期 |
2004.09.09 |
申请人 |
RJ MEARS, LLC |
发明人 |
MEARS ROBERT J.;STEPHENSON ROBERT JOHN |
分类号 |
H01L21/00;H01L21/8238;H01L29/10;H01L29/15;H01L29/78 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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