METHOD OF FORMING CONTACT PLUGS OF SEMICONDUCTOR DEVICE,申请号KR20050020693-传众专利搜索

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发明名称	METHOD OF FORMING CONTACT PLUGS OF SEMICONDUCTOR DEVICE
摘要
申请公布号	KR20060099317(A)	申请公布日期	2006.09.19
申请号	KR20050020693	申请日期	2005.03.11
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	PARK, JE MIN;HWANG, YOO SANG
分类号	H01L21/28;H01L21/8242	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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