发明名称 |
Drive mechanism, exposure device, optical equipment, and device manufacturing method |
摘要 |
The present invention provides a drive mechanism having a high rigidity and capable of performing fine adjustment in 6-axis directions of an optical element such as a mirror or a lens, or a support member for supporting the optical element, in optical equipment such as an exposure device. The drive mechanism has such a feature that three monolithic planar 3-joint or 4-joint link mechanisms are each arranged between a movable portion and a stationary portion through the intermediation of a bearing having at least one degree of freedom of rotation.
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申请公布号 |
US7110089(B2) |
申请公布日期 |
2006.09.19 |
申请号 |
US20040799424 |
申请日期 |
2004.03.11 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
MIZUNO MAKOTO |
分类号 |
G02B7/198;G03B27/42;G02B7/02;G02B7/182;G03F7/20;H01L21/027;H02N2/00 |
主分类号 |
G02B7/198 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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