| 摘要 |
A thermal mass flow sensor is disclosed that includes a housing ( 16 ) having a first sensor region and a second sensor region, a first thin film temperature sensor ( 39 ) formed at the first sensor region and a second thin film temperature sensor ( 58 ) formed at the second sensor region. A heating element ( 40 ) is arranged to heat the first temperature sensor ( 39 ) and a controller ( 46 ) is operably connected to the first temperature sensor ( 39 ), the second temperature sensor ( 58 ) and the heating element ( 40 ), and controls a power level to the heating element ( 40 ) to maintaining a temperature difference between the first temperature sensor ( 39 ) and the second temperature sensor ( 58 ). A thin film temperature sensor and a method of using the thermal mass flow sensor are also disclosed.
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