发明名称 |
Interferometer calibration methods and apparatus |
摘要 |
A method for calibrating an interferometer uses an actuator adapted to control an optical gap in response to application of an electrical signal. The interferometer is illuminated with a beam of light having a predetermined substantially monochromatic wavelength, oriented at a first predetermined angle of incidence, and light reflected from the interferometer at a second predetermined angle is detected while varying an electrical signal applied to the actuator, thereby establishing a calibrated relationship between the applied electrical signal and an optical path length of the interferometer.
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申请公布号 |
US7110122(B2) |
申请公布日期 |
2006.09.19 |
申请号 |
US20040897238 |
申请日期 |
2004.07.21 |
申请人 |
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. |
发明人 |
VAN BROCKLIN ANDREW L.;MARTIN ERIC T. |
分类号 |
G01B9/02;G02B27/00 |
主分类号 |
G01B9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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